Open AccessStudy of “Design and Manufacture of MEMS” Virtual Experimental Teaching
Publication year - 2018
Publication title -
jiao yu jin zhan
Language(s) - English
Resource type - Journals
eISSN - 2160-729X
pISSN - 2160-7303
DOI - 10.12677/ae.2018.83038
Subject(s) - microelectromechanical systems , engineering , computer science , manufacturing engineering , engineering drawing , systems engineering , mechanical engineering , materials science , nanotechnology