Open AccessA New Manufacturing Technology and Characteristics of Trench Gate MOSFET
Author(s) -
Jaemin Baek,
Moon-Taek Cho,
Seung-Kwon Na
Publication year - 2014
Publication title -
han'gug hang'haeng haghoe nonmunji/han-guk hanghaeng hakoe nonmunji
Language(s) - English
Resource type - Journals
eISSN - 2288-842X
pISSN - 1226-9026
DOI - 10.12673/jant.2014.18.4.364
Subject(s) - mosfet , trench , power mosfet , materials science , cmos , optoelectronics , shallow trench isolation , electrical engineering , fabrication , short channel effect , gate oxide , electronic engineering , transistor , engineering , nanotechnology , layer (electronics) , voltage , medicine , alternative medicine , pathology