Open AccessA New Manufacturing Technology and Characteristics of Trench Gate MOSFET
Author(s) -
Jong-Mu Baek,
Moon-Taek Cho,
Seung-Kwon Na
Publication year - 2014
Publication title -
the journal of advanced navigation technology
Language(s) - English
Resource type - Journals
eISSN - 2288-842X
pISSN - 1226-9026
DOI - 10.12673/jant.2014.18.4.364
Subject(s) - mosfet , trench , power mosfet , materials science , cmos , optoelectronics , shallow trench isolation , electrical engineering , fabrication , short channel effect , gate oxide , electronic engineering , transistor , engineering , nanotechnology , layer (electronics) , voltage , medicine , alternative medicine , pathology
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