Open AccessModified robust sliding-mode control method for wafer scanner
Author(s) -
Yiguang Wang,
Xinglin Chen,
Xiaojie Li
Publication year - 2015
Publication title -
advances in mechanical engineering/advances in mechanical engineering
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.318
H-Index - 40
eISSN - 1687-8140
pISSN - 1687-8132
DOI - 10.1177/1687814015577599
Subject(s) - control theory (sociology) , sliding mode control , jerk , lyapunov stability , motion control , computer science , integral sliding mode , parametric statistics , lyapunov function , robust control , variable structure control , trajectory , control system , engineering , mathematics , nonlinear system , acceleration , physics , control (management) , artificial intelligence , statistics , classical mechanics , quantum mechanics , astronomy , robot , electrical engineering
This article studies the precision motion control of a long-stroke reticle stage driven by the permanent magnet linear motor in wafer scanner. A robust sliding-mode control method is proposed for tracking the reference trajectory in the presence of un-modeled dynamics, parametric uncertainty and external disturbances including force ripple, cogging and friction in the controlled system. A modified sliding-mode term based on the variable structure technique for eliminating the tracking error is employed in the proposed control law. The system stability and tracking convergence of the closed-loop control system are guaranteed by Lyapunov theory theoretically. The feasibility and effectiveness of the proposed method are demonstrated by comparative experiments on a linear motion testbed. The experimental results show that better tracking performance can be achieved by the proposed method compared with the conventional proportional–integral–derivative method and it can be considered as a possible alternative in the precision motion control system