Open AccessDisplacement mechanical amplifiers designed on poly-silicon
Author(s) -
Ramón Cabello-Ruiz,
M. TecpoyotlTorres,
Alfonso Torres,
J. G. Vera-Dimas,
S. Koshevaya,
Pedro Vargas
Publication year - 2019
Publication title -
international journal of electrical and computer engineering (ijece)
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.277
H-Index - 22
ISSN - 2088-8708
DOI - 10.11591/ijece.v9i2.pp894-901
Subject(s) - accelerometer , displacement (psychology) , silicon , capacitive sensing , amplifier , workbench , sensitivity (control systems) , materials science , acoustics , computer science , electronic engineering , optoelectronics , electrical engineering , mechanical engineering , engineering , physics , cmos , psychology , visualization , psychotherapist , operating system
Using Poly-Silicon, the implementation of novel Displacement-amplifying Compliant Mechanisms (DaCM), in two geometries of accelerometers, allows for remarkable improvements in their operation frequency and displacement sensitivity, with different proportions. Similar DaCM´s geometries were previously implemented by us with Silicon. In all mentioned cases, the geometries of DaCM´s are adjusted in order to use them with Conventional Capacitive Accelerometer (CCA) and Capacitive Accelerometer with Extended Beams (CAEB), which operate in-plane mode, (y-axis). It should be noted that CAEB shows improvements (95.33%) in displacement sensitivity compared to ACC. Simulations results, carried out using Ansys Workbench software, validate the system’s performance designed with Poly-Silicon. Finally, a comparison with the similar systems, previously designed with Silicon, is also carried out.
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