Open AccessA Kinetic Model for Chemical-Vapor Deposition of Pure-Boron Layers from Diborane
Author(s) -
V. Mohammadi,
Wiebe de Boer,
T.L.M. Scholtes,
Lis K. Nanver
Publication year - 2012
Publication title -
meeting abstracts/meeting abstracts (electrochemical society. cd-rom)
Language(s) - English
Resource type - Journals
eISSN - 2151-2035
pISSN - 1091-8213
DOI - 10.1149/ma2012-01/21/904
Subject(s) - diborane , boron , chemical vapor deposition , kinetic energy , deposition (geology) , materials science , chemical engineering , chemistry , nanotechnology , geology , organic chemistry , physics , engineering , paleontology , quantum mechanics , sediment
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