Open AccessDie/Wafer Sub-Micron Alignment Strategies for Semiconductor Device Integration
Author(s) -
Lauren E. SheaRohwer,
James E. Martin,
Dahwey Chu
Publication year - 2011
Publication title -
meeting abstracts/meeting abstracts (electrochemical society. cd-rom)
Language(s) - Uncategorized
Resource type - Journals
eISSN - 2151-2035
pISSN - 1091-8213
DOI - 10.1149/ma2011-01/16/1159
Subject(s) - wafer , semiconductor , optoelectronics , materials science , semiconductor device , engineering physics , nanotechnology , engineering , layer (electronics)
not Available.
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