Open AccessNovel Batch Titanium Nitride CVD Process for Advanced Metal Electrodes
Author(s) -
P. M. Zagwijn,
Wilco Verweij,
Dieter Pierreux,
Noureddine Adjeroud,
R.G. Bankras,
Ed Oosterlaken,
Gert Jan Snijders,
Michiel Van den Hout,
Pamela R. Fischer,
Rudi Wilhelm,
Martin Knapp
Publication year - 2008
Publication title -
meeting abstracts/meeting abstracts (electrochemical society. cd-rom)
Language(s) - Uncategorized
Resource type - Journals
eISSN - 2151-2035
pISSN - 1091-8213
DOI - 10.1149/ma2008-01/16/680
Subject(s) - titanium nitride , materials science , titanium , electrode , nitride , process (computing) , metal , metallurgy , nanotechnology , computer science , chemistry , layer (electronics) , operating system
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