Open AccessPermittivity Enhancement of Mechanically Strained SrTiO3 MIM Capacitor
Author(s) -
Shin-Ichiro Kuroki,
Masayuki Toda,
Masaru Umeda,
Koji Kotani,
Takashi Ito
Publication year - 2007
Publication title -
meeting abstracts/meeting abstracts (electrochemical society. cd-rom)
Language(s) - English
Resource type - Journals
eISSN - 2151-2035
pISSN - 1091-8213
DOI - 10.1149/ma2007-02/19/1101
Subject(s) - capacitor , materials science , permittivity , composite material , optoelectronics , nanotechnology , dielectric , electrical engineering , engineering , voltage
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