Open AccessOnset of Dielectric Breakdown in Silicon Oxynitride Thin Films
Author(s) -
S. Habermehl,
Roger Apodaca
Publication year - 2006
Publication title -
meeting abstracts/meeting abstracts (electrochemical society. cd-rom)
Language(s) - English
Resource type - Journals
eISSN - 2151-2035
pISSN - 1091-8213
DOI - 10.1149/ma2005-01/9/423
Subject(s) - silicon oxynitride , materials science , dielectric , silicon , optoelectronics , composite material , dielectric strength , silicon nitride
not Available.
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