Open AccessPerspective—Recent Advances and Thoughts on Ceria Particle Applications in Chemical Mechanical Planarization
Author(s) -
Jihoon Seo,
Kijung Kim,
Hyun-Goo Kang,
S. V. Babu
Publication year - 2022
Publication title -
ecs journal of solid state science and technology
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.488
H-Index - 51
eISSN - 2162-8777
pISSN - 2162-8769
DOI - 10.1149/2162-8777/ac8310
Subject(s) - chemical mechanical planarization , materials science , nanotechnology , slurry , fabrication , particle (ecology) , engineering physics , engineering , composite material , medicine , oceanography , alternative medicine , layer (electronics) , pathology , geology
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