Open AccessWater Flow Improvement by Pinhole Outlet in Batch-Type Wet Cleaning Bath for Large-Diameter Wafers
Author(s) -
Toko Tsuchida,
Tomoko Takahashi,
Hitoshi Habuka,
Akira Gotō
Publication year - 2022
Publication title -
ecs journal of solid state science and technology
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.488
H-Index - 51
eISSN - 2162-8777
pISSN - 2162-8769
DOI - 10.1149/2162-8777/ac7bf0
Subject(s) - wafer , pinhole (optics) , materials science , water flow , volumetric flow rate , flow visualization , flow (mathematics) , composite material , front (military) , optics , optoelectronics , mechanics , environmental science , environmental engineering , mechanical engineering , physics , engineering