Open AccessPreparation and Characterization of p-Type Copper Gallium Oxide (CuGaO2) Thin Films by Dual Sputtering Using Cu and Ga2O3 Targets
Author(s) -
Ashwin Kumar Saikumar,
Sreeram Sundaresh,
Kalpathy B. Sundaram
Publication year - 2022
Publication title -
ecs journal of solid state science and technology
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.488
H-Index - 51
eISSN - 2162-8777
pISSN - 2162-8769
DOI - 10.1149/2162-8777/ac7821
Subject(s) - sputtering , materials science , x ray photoelectron spectroscopy , annealing (glass) , analytical chemistry (journal) , thin film , electrical resistivity and conductivity , gallium , copper , band gap , stoichiometry , optoelectronics , metallurgy , nuclear magnetic resonance , nanotechnology , chemistry , physics , engineering , chromatography , electrical engineering , organic chemistry