Open AccessControlled Fabrication of Wafer-Scale Zigzag Silicon Nanowire Arrays by Metal-Assisted Chemical Etching through Synergistic Effect of Viscosity and Temperature
Author(s) -
Abdul Mateen,
Ghulam Farid
Publication year - 2022
Publication title -
ecs journal of solid state science and technology
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.488
H-Index - 51
eISSN - 2162-8777
pISSN - 2162-8769
DOI - 10.1149/2162-8777/ac6d73
Subject(s) - zigzag , materials science , fabrication , isotropic etching , nanotechnology , silicon , wafer , etching (microfabrication) , nanowire , metal , silicon nanowires , optoelectronics , chemical engineering , metallurgy , geometry , layer (electronics) , medicine , alternative medicine , mathematics , pathology , engineering
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