Open AccessEffects of Electrochemical Mechanical Polishing on the Polishing Efficiency and Quality of Co with H2O2 and BTA under Alkaline Conditions
Author(s) -
Fangjin Xie,
Min Zhong,
Wenhu Xu
Publication year - 2021
Publication title -
ecs journal of solid state science and technology
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.488
H-Index - 51
eISSN - 2162-8777
pISSN - 2162-8769
DOI - 10.1149/2162-8777/ac3058
Subject(s) - polishing , materials science , electrochemistry , quality (philosophy) , metallurgy , electrode , chemistry , philosophy , epistemology