Open AccessEffect of ZnO-SiO2 Composite Abrasive on Sapphire Polishing Performance and Mechanism Analysis
Author(s) -
Ziyang Hou,
Xinhuan Niu,
Yanan Lu,
Yinchan Zhang,
Yebo Zhu
Publication year - 2021
Publication title -
ecs journal of solid state science and technology
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.488
H-Index - 51
eISSN - 2162-8777
pISSN - 2162-8769
DOI - 10.1149/2162-8777/ac2910
Subject(s) - chemical mechanical planarization , sapphire , materials science , abrasive , slurry , x ray photoelectron spectroscopy , surface roughness , polishing , composite number , chemical engineering , composite material , optics , laser , physics , engineering