Open AccessDensity Functional Theory Study on Dependence of Stability of Fe, Cu, and Ni Atoms on Surface Orientation of Si Crystal
Author(s) -
Hiroki Nagakura,
Koji Sueoka,
Noriyuki oda
Publication year - 2021
Publication title -
ecs journal of solid state science and technology
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.488
H-Index - 51
eISSN - 2162-8777
pISSN - 2162-8769
DOI - 10.1149/2162-8777/ac26d4
Subject(s) - materials science , wafer , metal , oxide , density functional theory , impurity , semiconductor , thermal stability , nanotechnology , optoelectronics , chemical engineering , metallurgy , computational chemistry , chemistry , organic chemistry , engineering