Open AccessPerspective—Current Understanding of the Halogenated Deposition Chemistry for Chemical Vapor Deposition of SiC
Author(s) -
Henrik Pedersen,
Lars Ojamäe,
Örjan Danielsson
Publication year - 2020
Publication title -
ecs journal of solid state science and technology
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.488
H-Index - 51
eISSN - 2162-8777
pISSN - 2162-8769
DOI - 10.1149/2162-8777/abbf2e
Subject(s) - chemical vapor deposition , chlorine , silicon carbide , deposition (geology) , materials science , silicon , nanotechnology , engineering physics , environmental chemistry , chemical engineering , chemistry , metallurgy , physics , engineering , paleontology , sediment , biology
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