Cleaning Solutions for Removal of ∼30 nm Ceria Particles from Proline and Citric Acid Containing Slurries Deposited on Silicon Dioxide and Silicon Nitride Surfaces | Zendy

Akshay Gowda | Zendy; Jihoon Seo | Zendy; C. K. Ranaweera | Zendy; S. V. Babu | Zendy

Open Access

Cleaning Solutions for Removal of ∼30 nm Ceria Particles from Proline and Citric Acid Containing Slurries Deposited on Silicon Dioxide and Silicon Nitride Surfaces

Author(s) -

Akshay Gowda,

Jihoon Seo,

C. K. Ranaweera,

S. V. Babu

Publication year - 2020

Publication title -

ecs journal of solid state science and technology

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.488

H-Index - 51

eISSN - 2162-8777

pISSN - 2162-8769

DOI - 10.1149/2162-8777/ab8ffa

Subject(s) - ammonium carbonate , materials science , ascorbic acid , citric acid , inorganic chemistry , aqueous solution , oxide , silicon nitride , fourier transform infrared spectroscopy , silicon dioxide , particle (ecology) , nitride , chemical engineering , nuclear chemistry , silicon , chemistry , organic chemistry , nanotechnology , metallurgy , layer (electronics) , engineering , oceanography , food science , geology

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