Open AccessCleaning Solutions for Removal of ∼30 nm Ceria Particles from Proline and Citric Acid Containing Slurries Deposited on Silicon Dioxide and Silicon Nitride Surfaces
Author(s) -
Akshay Gowda,
Jihoon Seo,
C. K. Ranaweera,
S. V. Babu
Publication year - 2020
Publication title -
ecs journal of solid state science and technology
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.488
H-Index - 51
eISSN - 2162-8777
pISSN - 2162-8769
DOI - 10.1149/2162-8777/ab8ffa
Subject(s) - ammonium carbonate , materials science , ascorbic acid , citric acid , inorganic chemistry , aqueous solution , oxide , silicon nitride , fourier transform infrared spectroscopy , silicon dioxide , particle (ecology) , nitride , chemical engineering , nuclear chemistry , silicon , chemistry , organic chemistry , nanotechnology , metallurgy , layer (electronics) , engineering , oceanography , food science , geology