Study on the Performance of Superlattice-Like Thin Film V2O5/Sb in Phase Change Memory
Author(s) -
Yongkang Xu,
Yifeng Hu,
Song Sun,
Xiaoqin Zhu,
Tianshu Lai,
Sannian Song,
Zhitang Song
Publication year - 2020
Publication title -
ecs journal of solid state science and technology
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.488
H-Index - 51
eISSN - 2162-8777
pISSN - 2162-8769
DOI - 10.1149/2162-8777/ab7885
Subject(s) - materials science , superlattice , thin film , raman spectroscopy , phase change memory , transmission electron microscopy , phase (matter) , crystallization , thermal stability , analytical chemistry (journal) , crystallography , optoelectronics , optics , nanotechnology , chemical engineering , layer (electronics) , chemistry , physics , organic chemistry , engineering , chromatography
Compared with Sb film, V 2 O 5 /Sb superlattice-like thin film has better thermal stability ( T c ∼ 240 °C, T 10-year ∼ 172.9 °C). V 2 O 5 /Sb thin film is suppressed by the multiple interfaces and the grains become smaller. The vibrational peaks of Sb-Sb and V–O bonds are observed by Raman measurement. The interaction between the two crystal systems improves the stability of the V 2 O 5 /Sb membrane. The multilayer structures before and after crystallization were observed by transmission electron microscopy. The ultralow-power (2.25 × 10 −12 J) and ultrafast-speed (8 ns) has been achieved for V 2 O 5 (1 nm)/Sb(9 nm)-based phase change memory device.
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