Open AccessIn-Situ Stress Measurements During Aluminum Deposition from AlCl3-EtMeImCl
Author(s) -
Gery R. Stafford
Publication year - 2004
Publication title -
ecs proceedings volumes
Language(s) - English
Resource type - Journals
eISSN - 2576-1579
pISSN - 0161-6374
DOI - 10.1149/200424.0888pv
Subject(s) - materials science , nucleation , chloride , ultimate tensile strength , coalescence (physics) , desorption , stress (linguistics) , monolayer , composite material , metallurgy , chemistry , nanotechnology , adsorption , linguistics , physics , philosophy , organic chemistry , astrobiology
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