Converting SOI to sSOI through Amorphization and Crystallization: Material Analysis and Device Demonstration | Zendy

S. Maı̂trejean | Zendy; N. Loubet | Zendy; E. Augendre | Zendy; P. Morin | Zendy; S. Reboh | Zendy; Nicolas Bernier | Zendy; R. Wacquez | Zendy; B. Lherron | Zendy; A. Bonnevialle | Zendy; Q. Liu | Zendy; JeanMichel Hartmann | Zendy; H. He | Zendy; A. Halimaoui | Zendy; J. Li | Zendy; S. Pilorget | Zendy; Joël Kanyandekwe | Zendy; L. Grenouillet | Zendy; F. Chafik | Zendy; Y. Morand | Zendy; C. Le Royer | Zendy; O. Faynot | Zendy; M. Celik | Zendy; B. Doris | Zendy; B. De Salvo | Zendy

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Converting SOI to sSOI through Amorphization and Crystallization: Material Analysis and Device Demonstration

Author(s) -

S. Maı̂trejean,

N. Loubet,

E. Augendre,

P. Morin,

S. Reboh,

Nicolas Bernier,

R. Wacquez,

B. Lherron,

A. Bonnevialle,

Q. Liu,

JeanMichel Hartmann,

H. He,

A. Halimaoui,

J. Li,

S. Pilorget,

Joël Kanyandekwe,

L. Grenouillet,

F. Chafik,

Y. Morand,

C. Le Royer,

O. Faynot,

M. Celik,

B. Doris,

B. De Salvo

Publication year - 2015

Publication title -

ecs journal of solid state science and technology

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.488

H-Index - 51

eISSN - 2162-8777

pISSN - 2162-8769

DOI - 10.1149/2.0171509jss

Subject(s) - materials science , silicon on insulator , optoelectronics , crystallization , epitaxy , substrate (aquarium) , cmos , semiconductor , silicon , nanotechnology , layer (electronics) , chemistry , oceanography , organic chemistry , geology

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