Open AccessConverting SOI to sSOI through Amorphization and Crystallization: Material Analysis and Device Demonstration
Author(s) -
S. Maîtrejean,
N. Loubet,
E. Augendre,
P. Morin,
Shay Reboh,
Nicolas Bernier,
R. Wacquez,
B. Lherron,
A. Bonnevialle,
Q. Liu,
JeanMichel Hartmann,
Hong He,
A. Halimaoui,
J. Li,
S. Pilorget,
J. Kanyandekwe,
L. Grenouillet,
F. Chafik,
Y. Morand,
C. Le Royer,
O. Faynot,
M. Celik,
B. Doris,
B. De Salvo
Publication year - 2015
Publication title -
ecs journal of solid state science and technology
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.488
H-Index - 51
eISSN - 2162-8777
pISSN - 2162-8769
DOI - 10.1149/2.0171509jss
Subject(s) - materials science , silicon on insulator , optoelectronics , crystallization , epitaxy , substrate (aquarium) , cmos , semiconductor , silicon , nanotechnology , layer (electronics) , chemistry , oceanography , organic chemistry , geology