Open AccessFormation of Nitiride Thin Films by Electrochemical Implantation
Author(s) -
T. Goto
Publication year - 1999
Publication title -
ecs proceedings volumes
Language(s) - English
Resource type - Journals
eISSN - 2576-1579
pISSN - 0161-6374
DOI - 10.1149/199941.0651pv
Subject(s) - electrochemistry , eutectic system , nitride , electrode , materials science , inorganic chemistry , thin film , chemical engineering , metallurgy , chemistry , alloy , nanotechnology , layer (electronics) , engineering
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