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Preparation of Chemical Precursors to Aluminum Nitride from an Ambient-Temperature Chloroaluminate Ionic Liquid
Author(s) -
Michael T. Carter
Publication year - 1998
Publication title -
ecs proceedings volumes
Language(s) - English
Resource type - Journals
eISSN - 2576-1579
pISSN - 0161-6374
DOI - 10.1149/199811.0187pv
Subject(s) - ionic liquid , nitride , inorganic chemistry , auger electron spectroscopy , molten salt , chloride , chemistry , infrared spectroscopy , ionic bonding , chemical reaction , chemical vapor deposition , fourier transform infrared spectroscopy , ammonia , chemical engineering , catalysis , organic chemistry , ion , physics , layer (electronics) , nuclear physics , engineering

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