Open AccessHigh Voltage Considerations for Silicon-on-Insulator Devices Using Porous Silicon
Author(s) -
T.R. Guilinger
Publication year - 1989
Publication title -
ecs proceedings volumes
Language(s) - English
Resource type - Journals
eISSN - 2576-1579
pISSN - 0161-6374
DOI - 10.1149/198915.0344pv
Subject(s) - materials science , silicon on insulator , optoelectronics , silicon , cmos , porous silicon , breakdown voltage , voltage , locos , high voltage , hybrid silicon laser , electrical engineering , electronic engineering , silicon nitride , engineering
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