Open AccessEffect of Substrate Oxygen Content on Smart Power ICS Yield. Intrinsic Gettering Effectiveness and Denuded Zone Calculation
Author(s) -
Flavio Francesco Villa
Publication year - 1989
Publication title -
ecs proceedings volumes
Language(s) - English
Resource type - Journals
eISSN - 2576-1579
pISSN - 0161-6374
DOI - 10.1149/198915.0228pv
Subject(s) - getter , wafer , yield (engineering) , materials science , substrate (aquarium) , oxygen , transistor , optoelectronics , electronic engineering , electrical engineering , chemistry , metallurgy , engineering , geology , oceanography , organic chemistry , voltage
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