Open AccessRefractory Silicide technologies for Smart-Power Applications
Author(s) -
K. Shenai
Publication year - 1989
Publication title -
ecs proceedings volumes
Language(s) - Uncategorized
Resource type - Journals
eISSN - 2576-1579
pISSN - 0161-6374
DOI - 10.1149/198915.0141pv
Subject(s) - materials science , silicide , optoelectronics , dopant , engineering physics , tungsten , refractory metals , electrical engineering , electronic engineering , silicon , doping , metallurgy , engineering
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