Precipitation of Antimony Implanted into Silicon | Zendy

S. Koffel | Zendy; P. Pichler | Zendy; M Reading | Zendy; Jaap van den Berg | Zendy; H. Kheyrandish | Zendy; Silke Hamm | Zendy; Wilfried Lerch | Zendy; A. Pakfar | Zendy; C. Tavernier | Zendy

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Precipitation of Antimony Implanted into Silicon

Author(s) -

S. Koffel,

P. Pichler,

M Reading,

Jaap van den Berg,

H. Kheyrandish,

Silke Hamm,

Wilfried Lerch,

A. Pakfar,

C. Tavernier

Publication year - 2012

Publication title -

ecs transactions

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.235

H-Index - 52

eISSN - 1938-6737

pISSN - 1938-5862

DOI - 10.1149/1.3697457

Subject(s) - antimony , silicon , precipitation , epitaxy , materials science , annealing (glass) , thermal , metallurgy , analytical chemistry (journal) , nanotechnology , chemistry , thermodynamics , physics , layer (electronics) , meteorology , chromatography

Antimony was implanted into silicon, followed by a rapid thermal annealing step to recrystallize the substrate. Post-activation annealings were made at 800 and 900 °C with increasing time, to study the deactivation of antimony using a combination of SIMS, MEIS and TEM analyses. It was found that the antimony profile does not broaden for moderate thermal budgets. However, during thermal treatments, antimony atoms continuously move towards the surface. There, they pile-up in non-substitutional positions and form precipitates. It was also confirmed that this phenomenon happens after solid phase epitaxy. Possible explanations are discussed

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