Open AccessDie/Wafer Sub-Micron Alignment Strategies for Semiconductor Device Integration
Author(s) -
Lauren E. SheaRohwer,
James E. Martin,
Dahwey Chu
Publication year - 2011
Publication title -
ecs transactions
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 0.235
H-Index - 52
eISSN - 1938-6737
pISSN - 1938-5862
DOI - 10.1149/1.3568857
Subject(s) - wafer , computation , materials science , semiconductor , die (integrated circuit) , optoelectronics , line (geometry) , torque , surface (topology) , optics , nanotechnology , computer science , physics , geometry , mathematics , algorithm , thermodynamics
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