Open AccessControlled Synthesis of 3D Nanostructures Using Proximity-Field Nanopatterning Lithography and Graded Temperature ALD
Author(s) -
Robert K. Grubbs,
A. Robert Ellis,
A. M. Sanchez,
Michael Wiwi,
Ihab El-Kady,
K. H. A. Bogart,
Ming Su,
Christos Christodoulou,
Mahmoud Reda Taha,
D. L. Shir,
John A. Rogers
Publication year - 2008
Publication title -
ecs transactions
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.235
H-Index - 52
eISSN - 1938-6737
pISSN - 1938-5862
DOI - 10.1149/1.2979991
Subject(s) - nanostructure , materials science , nanotechnology , quartz crystal microbalance , lithography , nanolithography , optoelectronics , fabrication , chemistry , medicine , alternative medicine , organic chemistry , adsorption , pathology
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