Aberration-corrected Scanning Transmission Electron Microscopy for Atomic-scale Characterization of Semiconductor Devices | Zendy

Klaus van Benthem | Zendy; Stephen J. Pennycook | Zendy

Open Access

Aberration-corrected Scanning Transmission Electron Microscopy for Atomic-scale Characterization of Semiconductor Devices

Author(s) -

Klaus van Benthem,

Stephen J. Pennycook

Publication year - 2007

Publication title -

ecs transactions

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.235

H-Index - 52

eISSN - 1938-6737

pISSN - 1938-5862

DOI - 10.1149/1.2779062

Subject(s) - scanning transmission electron microscopy , characterization (materials science) , semiconductor , scanning confocal electron microscopy , optics , dark field microscopy , electron tomography , conventional transmission electron microscope , materials science , energy filtered transmission electron microscopy , transmission electron microscopy , atomic units , semiconductor device , scanning electron microscope , electron , spherical aberration , microscopy , optoelectronics , physics , nanotechnology , layer (electronics) , quantum mechanics , lens (geology)

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