Preferred  Surface and In-Plane Orientations in Self-Assembled Poly-Si by Multiple Excimer Laser Irradiation | Zendy

Ming He | Zendy; Ryoichi Ishihara | Zendy; Wim Metselaar | Zendy; Kees Beenakker | Zendy

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Preferred <100> Surface and In-Plane Orientations in Self-Assembled Poly-Si by Multiple Excimer Laser Irradiation

Author(s) -

Ming He,

Ryoichi Ishihara,

Wim Metselaar,

Kees Beenakker

Publication year - 2006

Publication title -

ecs transactions

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.235

H-Index - 52

eISSN - 1938-6737

pISSN - 1938-5862

DOI - 10.1149/1.2356350

Subject(s) - materials science , excimer laser , orientation (vector space) , irradiation , plane (geometry) , layer (electronics) , surface (topology) , laser , optoelectronics , optics , composite material , geometry , physics , mathematics , nuclear physics

Clear preference of <100>- orientation in self-assembled poly- Si is observed for the first time not only in surface, but also in-plane orientations. This textured poly-Si can be used for TFT active channel, expecting a high performance with an excellent uniformity; or can be used as a seed layer for orientation controlling.Electrical Engineering, Mathematics and Computer Scienc

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