Open AccessThe Effect of Surface Orientation on Silicon Oxidation Kinetics
Author(s) -
E. A. Lewis,
E. A. Irene
Publication year - 1987
Publication title -
journal of the electrochemical society
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.258
H-Index - 271
eISSN - 1945-7111
pISSN - 0013-4651
DOI - 10.1149/1.2100881
Subject(s) - silicon , crossover , oxide , materials science , kinetics , thermal oxidation , stress (linguistics) , orientation (vector space) , surface stress , crystallography , chemical physics , chemistry , composite material , surface energy , metallurgy , geometry , physics , linguistics , philosophy , mathematics , quantum mechanics , artificial intelligence , computer science
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