Open AccessAn Oxygen Tracer Study of InP Oxidation
Author(s) -
X. Liu,
M. Denker,
E. A. Irene
Publication year - 1992
Publication title -
journal of the electrochemical society
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.258
H-Index - 271
eISSN - 1945-7111
pISSN - 0013-4651
DOI - 10.1149/1.2069305
Subject(s) - oxide , thermal oxidation , limiting , oxygen , diffusion , tracer , chemistry , secondary ion mass spectrometry , substrate (aquarium) , ion , chemical engineering , inorganic chemistry , chemical physics , analytical chemistry (journal) , environmental chemistry , thermodynamics , geology , organic chemistry , nuclear physics , mechanical engineering , physics , oceanography , engineering
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