Open Access(Invited) AlN and ScAlN Contour Mode Resonators for RF Filters
Author(s) -
Michael David Henry,
Robert P. Timon,
Travis Ryan Young,
Chris Nordquist,
Ben Griffin
Publication year - 2017
Publication title -
ecs transactions
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.235
H-Index - 52
eISSN - 1938-6737
pISSN - 1938-5862
DOI - 10.1149/07706.0023ecst
Subject(s) - resonator , wafer , fabrication , materials science , piezoelectricity , optoelectronics , substrate (aquarium) , radio frequency , electronic engineering , acoustics , computer science , engineering , telecommunications , physics , medicine , oceanography , alternative medicine , pathology , geology
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