Open AccessCatalytic Decomposition of PH3 on Heated Tungsten Wire Surfaces
Author(s) -
Hironobu Umemoto,
Yushin Nishihara,
Takuma Ishikawa,
S. Yamamoto
Publication year - 2012
Publication title -
japanese journal of applied physics
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.487
H-Index - 129
eISSN - 1347-4065
pISSN - 0021-4922
DOI - 10.1143/jjap.51.086501
Subject(s) - decomposition , catalysis , chemistry , tungsten , dopant , inorganic chemistry , radical , analytical chemistry (journal) , doping , materials science , organic chemistry , optoelectronics
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