Negative Ion Volume Production in Electron Cyclotron Resonance Hydrogen Plasmas | Zendy

Osamu Fukumasa | Zendy; Masanori Matsumori | Zendy

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Negative Ion Volume Production in Electron Cyclotron Resonance Hydrogen Plasmas

Author(s) -

Osamu Fukumasa,

Masanori Matsumori

Publication year - 1999

Publication title -

japanese journal of applied physics

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.487

H-Index - 129

eISSN - 1347-4065

pISSN - 0021-4922

DOI - 10.1143/jjap.38.4581

Subject(s) - electron cyclotron resonance , plasma , atomic physics , microwave , ion , ion source , electron , magnetic mirror , cyclotron , ion cyclotron resonance , physics , nuclear physics , quantum mechanics

Production and control of electron cyclotron resonance (ECR) plasmas for negative ion sources have been studied. A new production method using permanent magnets is proposed as one possibility for generating a large-diameter high-density uniform microwave plasma. The microwave power is launched by an annular slot antenna into the circumference of a chamber with a ring-cusp or a line-cusp permanent magnet, where a magnetic field can be applied in a local region and plasmas can be efficiently generated if the ECR condition is satisfied. In this paper, we report the structure of the ECR negative ion source, the characteristics of the ECR plasmas, and the comparison of the ECR plasmas with DC discharge plasmas from the viewpoint of a negative ion source

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