Open AccessElectrostatic Coupling of Antenna and the Shielding Effect in Inductive RF Plasmas
Author(s) -
Hideo Sugai,
K. Nakamura,
Keiji Suzuki
Publication year - 1994
Publication title -
japanese journal of applied physics
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.487
H-Index - 129
eISSN - 1347-4065
pISSN - 0021-4922
DOI - 10.1143/jjap.33.2189
Subject(s) - faraday cage , antenna (radio) , capacitive coupling , inductive coupling , materials science , coupling (piping) , plasma , electromagnetic shielding , inductively coupled plasma , optoelectronics , voltage , optics , electrical engineering , physics , magnetic field , quantum mechanics , metallurgy , composite material , engineering
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