Open AccessPhotolithographic realization of target nanostructures in 3D space by inverse design of phase modulation
Author(s) -
SangHyeon Nam,
Myungjoon Kim,
Nayoung Kim,
Donghwi Cho,
Myungwoo Choi,
Junhyung Park,
Jonghwa Shin,
Seokwoo Jeon
Publication year - 2022
Publication title -
science advances
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 5.928
H-Index - 146
ISSN - 2375-2548
DOI - 10.1126/sciadv.abm6310
Subject(s) - realization (probability) , fabrication , nanotechnology , lithography , inverse , nanomaterials , computer science , interference (communication) , materials science , photolithography , nanostructure , optoelectronics , mathematics , telecommunications , medicine , channel (broadcasting) , statistics , alternative medicine , geometry , pathology
Accelerating Research
Robert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom
Address
John Eccles HouseRobert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom