Open AccessPartial Least-Squares Calibration Diagnostics Applied To The FT-IR Analysis Of Borophosphosilicate Glass (BPSG) Thin Films*
Author(s) -
David M. Haaland
Publication year - 1989
Publication title -
proceedings of spie, the international society for optical engineering/proceedings of spie
Language(s) - English
Resource type - Conference proceedings
SCImago Journal Rank - 0.192
H-Index - 176
eISSN - 1996-756X
pISSN - 0277-786X
DOI - 10.1117/12.969531
Subject(s) - calibration , partial least squares regression , materials science , analytical chemistry (journal) , infrared spectroscopy , chemometrics , thin film , silicon , spectroscopy , flagging , optics , optoelectronics , chemistry , computer science , nanotechnology , mathematics , chromatography , physics , statistics , quantum mechanics , archaeology , machine learning , history , organic chemistry
Accelerating Research
Robert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom
Address
John Eccles HouseRobert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom