Open AccessAbsolute Multilayer Characterization At High Spatial Resolution Via Real-Time Soft X-Ray Imaging
Author(s) -
Larry Madison
Publication year - 1989
Publication title -
proceedings of spie, the international society for optical engineering/proceedings of spie
Language(s) - Uncategorized
Resource type - Conference proceedings
SCImago Journal Rank - 0.192
H-Index - 176
eISSN - 1996-756X
pISSN - 0277-786X
DOI - 10.1117/12.962619
Subject(s) - characterization (materials science) , image resolution , throughput , wafer , optics , materials science , temporal resolution , computer science , physics , optoelectronics , telecommunications , wireless
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