Open AccessMicrosystems: Technology Enabler
Author(s) -
Murat Okandan
Publication year - 2012
Publication title -
proceedings of spie, the international society for optical engineering/proceedings of spie
Language(s) - Uncategorized
Resource type - Conference proceedings
SCImago Journal Rank - 0.192
H-Index - 176
eISSN - 1996-756X
pISSN - 0277-786X
DOI - 10.1117/12.921338
Subject(s) - enabling , computer science , pace , key (lock) , microsystem , microelectronics , systems engineering , nanotechnology , electrical engineering , engineering , computer security , psychology , materials science , geodesy , geography , psychotherapist
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