In-situ diagnostics on fs-laser induced modification of glasses for selective etching | Zendy

M.E.A. Hermans | Zendy; Jens Gottmann | Zendy; Anna Schiffer | Zendy

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In-situ diagnostics on fs-laser induced modification of glasses for selective etching

Author(s) -

M.E.A. Hermans,

Jens Gottmann,

Anna Schiffer

Publication year - 2012

Publication title -

proceedings of spie, the international society for optical engineering/proceedings of spie

Language(s) - English

Resource type - Conference proceedings

SCImago Journal Rank - 0.192

H-Index - 176

eISSN - 1996-756X

pISSN - 0277-786X

DOI - 10.1117/12.912765

Subject(s) - materials science , laser , optics , interferometry , refractive index , etching (microfabrication) , absorption (acoustics) , optoelectronics , optical path length , microscope , optical path , in situ , radiation , isotropic etching , nanotechnology , composite material , chemistry , physics , organic chemistry , layer (electronics)

In-situ observation of the in-volume modification of glasses by focused ultra-short pulsed laser radiation with an interferometer microscope allows for the spatially resolved measurement of the transient optical path difference (OPD) in the surrounding of the laser-induced modification. By the relation of refractive index and temperature an estimation of temperature during modification process is possible. The absorption of the laser radiation is measured and is, together with the estimation of processing temperature during modification, a first step towards a process model for the induced modifications of the transparent material

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