Open AccessTribological challenges in MEMS and their mitigation via vapor phase lubrication
Author(s) -
Michael T. Dugger
Publication year - 2011
Publication title -
proceedings of spie, the international society for optical engineering/proceedings of spie
Language(s) - English
Resource type - Conference proceedings
SCImago Journal Rank - 0.192
H-Index - 176
eISSN - 1996-756X
pISSN - 0277-786X
DOI - 10.1117/12.884509
Subject(s) - lubrication , tribology , microelectromechanical systems , materials science , fabrication , reliability (semiconductor) , adhesion , silicon , nanotechnology , mechanical engineering , composite material , engineering , optoelectronics , medicine , power (physics) , alternative medicine , physics , pathology , quantum mechanics
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