Design of RF MEMS switches without pull-in instability
Author(s) -
W. Cyrus Proctor,
Gregory Richards,
Chongyi Shen,
Tyler Skorczewski,
Min Wang,
Jingyan Zhang,
Peng Zhong,
Jordan E. Massad,
Ralph C. Smith
Publication year - 2010
Publication title -
proceedings of spie, the international society for optical engineering/proceedings of spie
Language(s) - English
Resource type - Conference proceedings
SCImago Journal Rank - 0.192
H-Index - 176
eISSN - 1996-756X
pISSN - 0277-786X
DOI - 10.1117/12.848045
Subject(s) - microelectromechanical systems , cantilever , radio frequency , reliability (semiconductor) , analogue switch , switching time , signal (programming language) , voltage , instability , electronic engineering , power (physics) , electrical engineering , engineering , computer science , materials science , optoelectronics , physics , quantum mechanics , programming language , mechanics , aerospace engineering
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