Stability experiments on MEMS aluminum nitride RF resonators | Zendy

Danelle M. Tanner | Zendy; Roy H. Olsson | Zendy; Ted B. Parson | Zendy; Shan Marie Crouch | Zendy; Jeremy A. Walraven | Zendy; James Anthony Ohlhausen | Zendy

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Stability experiments on MEMS aluminum nitride RF resonators

Author(s) -

Danelle M. Tanner,

Roy H. Olsson,

Ted B. Parson,

Shan Marie Crouch,

Jeremy A. Walraven,

James Anthony Ohlhausen

Publication year - 2010

Publication title -

proceedings of spie, the international society for optical engineering/proceedings of spie

Language(s) - Uncategorized

Resource type - Conference proceedings

SCImago Journal Rank - 0.192

H-Index - 176

eISSN - 1996-756X

pISSN - 0277-786X

DOI - 10.1117/12.846551

Subject(s) - materials science , resonator , wafer , microelectromechanical systems , optoelectronics , silicon nitride , fabrication , secondary ion mass spectrometry , nitride , vacuum chamber , radio frequency , silicon , electrical engineering , nanotechnology , mass spectrometry , composite material , chemistry , medicine , alternative medicine , engineering , pathology , layer (electronics) , chromatography

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