Open AccessThermal microactuator performance as a function of mechanical stress
Author(s) -
Leslie M. Phinney,
Matthew Spletzer,
Michael Baker,
Justin R. Serrano
Publication year - 2010
Publication title -
proceedings of spie, the international society for optical engineering/proceedings of spie
Language(s) - English
Resource type - Conference proceedings
SCImago Journal Rank - 0.192
H-Index - 176
eISSN - 1996-756X
pISSN - 0277-786X
DOI - 10.1117/12.846370
Subject(s) - microactuator , materials science , residual stress , bending , microsystem , stress (linguistics) , thermal , ultimate tensile strength , composite material , microelectromechanical systems , structural engineering , mechanical engineering , actuator , engineering , optoelectronics , nanotechnology , electrical engineering , linguistics , philosophy , physics , meteorology
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