Open AccessMorphology, microstructure, stress and damage properties of thin film coatings for the LCLS x-ray mirrors
Author(s) -
Régina Soufli,
Sherry L. Baker,
Jeff C. Robinson,
Eric M. Gullikson,
T. McCarville,
M. J. Pivovaroff,
P.M. Stefan,
Stefan P. HauRiege,
R. M. Bionta
Publication year - 2009
Publication title -
proceedings of spie, the international society for optical engineering/proceedings of spie
Language(s) - English
Resource type - Conference proceedings
SCImago Journal Rank - 0.192
H-Index - 176
eISSN - 1996-756X
pISSN - 0277-786X
DOI - 10.1117/12.823836
Subject(s) - materials science , optics , microstructure , thin film , coating , surface roughness , x ray optics , optical coating , surface finish , wavefront , stress (linguistics) , substrate (aquarium) , optoelectronics , composite material , x ray , physics , nanotechnology , philosophy , oceanography , geology , linguistics
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