Fabrication of diffractive optics for dense optical interconnects in optical computing
Author(s) -
Alvaro Augusto Cruz-Cabrera,
Shanalyn A. Kemme,
J. R. Wendt,
T. R. Carter,
S. Samora,
Gordon A. Keeler,
Darwin K. Serkland
Publication year - 2009
Publication title -
proceedings of spie, the international society for optical engineering/proceedings of spie
Language(s) - English
Resource type - Conference proceedings
SCImago Journal Rank - 0.192
H-Index - 176
eISSN - 1996-756X
pISSN - 0277-786X
DOI - 10.1117/12.811598
Subject(s) - photolithography , collimated light , optics , fabrication , lithography , materials science , deflection (physics) , focus (optics) , optoelectronics , computer science , physics , laser , medicine , alternative medicine , pathology
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