Open AccessThermally actuated microshutter for MOEMS applications
Author(s) -
Derrick Langley,
LaVern A. Starman,
Ronald A. Coutu,
Stanley Rogers
Publication year - 2009
Publication title -
proceedings of spie, the international society for optical engineering/proceedings of spie
Language(s) - Uncategorized
Resource type - Conference proceedings
SCImago Journal Rank - 0.192
H-Index - 176
eISSN - 1996-756X
pISSN - 0277-786X
DOI - 10.1117/12.809776
Subject(s) - actuator , shutter , microelectromechanical systems , fabrication , reliability (semiconductor) , microactuator , thermal , materials science , computer science , power (physics) , electronic engineering , mechanical engineering , electrical engineering , engineering , optoelectronics , physics , medicine , alternative medicine , pathology , quantum mechanics , meteorology
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