A MEMS based visible-NIR Fourier transform microspectrometer | Zendy

Ç‪ağlar Ataman | Zendy; Hakan Ürey | Zendy; Serhan O. Isikman | Zendy; A. Wolter | Zendy

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A MEMS based visible-NIR Fourier transform microspectrometer

Author(s) -

Ç‪ağlar Ataman,

Hakan Ürey,

Serhan O. Isikman,

A. Wolter

Publication year - 2006

Publication title -

proceedings of spie, the international society for optical engineering/proceedings of spie

Language(s) - English

Resource type - Conference proceedings

SCImago Journal Rank - 0.192

H-Index - 176

eISSN - 1996-756X

pISSN - 0277-786X

DOI - 10.1117/12.664781

Subject(s) - fourier transform , microelectromechanical systems , materials science , computer science , optoelectronics , physics , quantum mechanics

Design, fabrication and characterization of a novel out-of-plane vertical comb-drive actuator based Fourier transform microspectrometer (FTS) is presented. The spectrometer utilizes resonant mode vertical comb actuators as a variable-depth diffraction grating and a single photodetector to monitor the 0th order of the diffraction pattern. The spectrum of the source illuminating the gratings is computed by Fourier transforming the 0th order intensity as a function of the optical path difference. The vertical comb actuators have a travel range of 100 mu m under atmospheric pressure with 28V excitation, which yields a theoretical spectral resolution of 0.5nm in the visible and better than 5nm in the telecom wavelengths

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